An all SU-8 microfluidic chip with built-in 3D fine microstructuresSATO, Hironobu; MATSUMURA, Hirokazu; KEINO, Satoshi et al.Journal of micromechanics and microengineering (Print). 2006, Vol 16, Num 11, pp 2318-2322, issn 0960-1317, 5 p.Article

Interdigitated array 3D micromesh electrodes for electrochemical sensorsSATO, Hironobu; YOSHIMINE, Kei; OTSUKA, Toshiharu et al.Journal of micromechanics and microengineering (Print). 2007, Vol 17, Num 5, pp 909-914, issn 0960-1317, 6 p.Article

Studies on low-temperature direct bonding of VUV/O₃-, VUV- and O₂ plasma-pre-treated poly-methylmethacrylateSHINOHARA, Hidetoshi; KASAHARA, Takashi; SHOJI, Shuichi et al.Journal of micromechanics and microengineering (Print). 2011, Vol 21, Num 8, issn 0960-1317, 085028.1-085028.9Article

Effects of Vacuum Ultraviolet Surface Treatment on the Bonding Interconnections for Flip Chip and 3-D IntegrationSAKUMA, Katsuyuki; MIZUNO, Jun; NAGAI, Noriyasu et al.IEEE transactions on electronics packaging manufacturing. 2010, Vol 33, Num 3, pp 212-220, issn 1521-334X, 9 p.Article

Electrochemical etching process to tune the diameter of arrayed deep pores by controlling carrier collection at a semiconductor―electrolyte interfaceSATO, Hirotaka; YAMAGUCHI, Takuya; ISOBE, Tetsuhiko et al.Electrochemistry communications. 2010, Vol 12, Num 6, pp 765-768, issn 1388-2481, 4 p.Article

3D sheath flow using hydrodynamic position control of the sample flowSATO, Hironobu; SASAMOTO, Yutaka; YAGYU, Daisuke et al.Journal of micromechanics and microengineering (Print). 2007, Vol 17, Num 11, pp 2211-2216, issn 0960-1317, 6 p.Article

Simulation of droplet generation in micro flow using MPS methodHARADA, Takahiro; SUZUKI, Yukihito; KOSHIZUKA, Seiichi et al.JSME international journal. Series B, fluids and thermal engineering. 2006, Vol 49, Num 3, pp 731-736, issn 1340-8054, 6 p.Article

Simplified 20-μm Pitch Vertical Interconnection Process for 3D Chip Stacking : Frontier in Sensors and MicromachinesSAKUMA, Katsuyuki; NAGAI, Noriyasu; SAITO, Mikiko et al.IEEJ transactions on electrical and electronic engineering. 2009, Vol 4, Num 3, pp 339-344, issn 1931-4973, 6 p.Article

MEMS-based design and fabrication of a new concept micro direct methanol fuel cell (μ-DMFC)MOTOKAWA, Shinji; MOHAMEDI, Mohamed; MOMMA, Toshiyuki et al.Electrochemistry communications. 2004, Vol 6, Num 6, pp 562-565, issn 1388-2481, 4 p.Article

Picoliter volume glass tube array fabricated by Si electrochemical etching processSATO, Hirotaka; HOMMA, Takayuki; MORI, Kentaro et al.Electrochimica acta. 2005, Vol 51, Num 5, pp 844-848, issn 0013-4686, 5 p.Conference Paper

Functional 3-D PDMS microchannels having slanted grooves embedded walls realizing spiral flowSATO, Hironobu; ITO, Seiki; TAJIMA, Kenji et al.IEEE International Conference on Micro Electro Mechanical Systems. 2004, pp 693-696, isbn 0-7803-8265-X, 1Vol, 4 p.Conference Paper

High aspect ratio nanovolume glass cell array fabricated by area-selective silicon electrochemical etching processHOMMA, Takayuki; SATO, Hirotaka; MORI, Kentaro et al.IEEE International Conference on Micro Electro Mechanical Systems. 2004, pp 705-708, isbn 0-7803-8265-X, 1Vol, 4 p.Conference Paper

An Experimental Study on Relative Displacement Sensing Using Phototransistor Array for Building StructuresKANEKAWA, Kiyoshi; MATSUYA, Iwao; TANII, Takashi et al.IEEJ transactions on electrical and electronic engineering. 2010, Vol 5, Num 2, pp 251-255, issn 1931-4973, 5 p.Article

Development of an electrohydrodynamic ion-drag micropump using three-dimensional carbon micromesh electrodesDONG HYUN YOON; SATO, Hironobu; NAKAHARA, Asahi et al.Journal of micromechanics and microengineering (Print). 2014, Vol 24, Num 9, issn 0960-1317, 095003.1-095003.6Article

Three-dimensional microfabrication process using bi electrodeposition for a highly sensitive X-ray imaging sensorSATO, Hirotaka; HOMMA, Takayuki; KUDO, Hiroyuki et al.Journal of electroanalytical chemistry (1992). 2005, Vol 584, Num 1, pp 28-33, issn 1572-6657, 6 p.Conference Paper

Improvements of an X-ray microcalorimeter for detecting cosmic raysYOKOYAMA, Yuichi; SHOJI, Shuichi; KAGEI, Tomohiro et al.SPIE proceedings series. 2000, pp 58-65, isbn 0-8194-3902-9Conference Paper

Development of Lateral Displacement Sensor for Real-Time Detection of Structural DamageMATSUYA, Iwao; TOMISHI, Ryota; TANII, Takashi et al.IEEJ transactions on electrical and electronic engineering. 2011, Vol 6, Num 3, pp 266-272, issn 1931-4973, 7 p.Article

Fabrication of high-aspect-ratio amorphous perfluorinated polymer structure for total internal reflection fluorescence microscopyNAKAHARA, Asahi; SHIRASAKI, Yoshitaka; KAWAI, Kentaro et al.Microelectronic engineering. 2011, Vol 88, Num 8, pp 1817-1820, issn 0167-9317, 4 p.Conference Paper

Sn electrodeposition process for fabricating microabsorber arrays for an X-ray microcalorimeterHOMMA, Takayuki; SATO, Hirotaka; FUJIMOTO, Ryuichi et al.Journal of electroanalytical chemistry (1992). 2003, Vol 559, pp 143-148, issn 1572-6657, 6 p.Conference Paper

Use of Folded Micromachined Pillar Array Column with Low-Dispersion Turns for Pressure-Driven Liquid ChromatographyAOYAMA, Chiaki; SAEKI, Akira; NOGUCHI, Masao et al.Analytical chemistry (Washington). 2010, Vol 82, Num 4, pp 1420-1426, issn 0003-2700, 7 p.Article

Electrochemical Fabrication and Characterization of CoPt Bit Patterned Media: Towards a Wetchemical, Large-Scale FabricationOUCHI, Takanari; ARIKAWA, Yuki; KUNO, Taisuke et al.IEEE transactions on magnetics. 2010, Vol 46, Num 6, pp 2224-2227, issn 0018-9464, 4 p.Conference Paper

Real-time monitoring of antibody secretion from B-cells on a microchip stimulated with a minute amount of mitogenMUNAKA, Tatsuya; ABE, Hirohisa; KANAI, Masaki et al.Analyst (London. 1877. Print). 2007, Vol 132, Num 6, pp 512-514, issn 0003-2654, 3 p.Article

High efficiency electrochemical immuno sensors using 3D comb electrodesHONDA, Nobuo; INABA, Masashi; KATAGIRI, Takashi et al.Biosensors & bioelectronics. 2005, Vol 20, Num 11, pp 2306-2309, issn 0956-5663, 4 p.Article

Integration of Pillar Array Columns into a Gradient Elution System for Pressure-Driven Liquid ChromatographyYANTING SONG; NOGUCHI, Masao; TAKATSUKI, Katsuya et al.Analytical chemistry (Washington). 2012, Vol 84, Num 11, pp 4739-4745, issn 0003-2700, 7 p.Article

Relative-Story Displacement Sensor for Measuring Five-Degree-of-Freedom Movement of Building LayersMATSUYA, Iwao; KATAMURA, Ryuta; SHOJI, Shuichi et al.Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 7981, issn 0277-786X, isbn 978-0-8194-8543-4, 79810C.1-79810C.10, 2Conference Paper